ZH
Micro-Electronics
Description
The microelectronics industry demands ultra-pure water and ultra-high purity chemicals to support semiconductor and IC manufacturing. Lanran provides EDI technology for ultrapure water production and ED/BPED solutions for reclaiming and purifying key process chemicals such as TMAH (Tetramethylammonium Hydroxide).
Process
- EDI: RO-treated water enters the EDI module, where residual ions are continuously removed, producing ultrapure water.
- TMAH Recovery: ED/BPED technology separates and recovers TMAH from developer wastewater, enabling reuse.
Applications
- Ultrapure water for wafer cleaning
- TMAH recovery and purification for semiconductor lithography
- Chemical recycling in IC production
Advantages
- Stable ultrapure water quality without chemical regeneration
- Significant cost and risk reduction via TMAH recycling
- Ensures compliance with strict semiconductor-grade purity standards